Entwodiksyon nan konpayi asirans wafer
KATAGORI PWODWI
▶Wafer Carrier System pou PECVD & TALOX Pwosesis
• Bato grafit PECVD & TALOX (M4 ~ M12)
• Vètikal SM-Boat (M4, M6)
• Pati enplant ak douch Graphite (M4 ~ M6)
• C/C Plato & Seramik kouch
• Metal RIE-Tray & Seramik kouch
• Vacuum Sealing: O-Ring & SQ-Ring
▶Texturing & Mouye Etching Transfè Pwosesis
• LSC H-Carrier oswa kasèt (M4 ~ M12)
• LSC V-Carrier oswa kasèt (M4 ~ M12)
• ASC Carrier oswa kasèt (M4, M6)
• W/F Carrier & Bwat Depo (M4 ~ M12)
• Transpò wou (woulo) Seri
▶Solè Selil Carrier & Metal Carrier
• TRC Carrier oswa kasèt (M4 ~ M12)
• Magazin (ak senti)
BAT GRAPHITE (Tip H)
19P6-216CT (WF M4 ~ M12)
BAT GRAPHITE (Tip H)
21P6-240CT WF M4 ~ M12)
BAT GRAPHITE (Tip H)
23P7-308CT (W/F M4 ~ M12)
BAT GRAPHITE (Tip H)
22P/7-294TP (W/F M4 ~ M12)
BAT GRAPHITE (Tip H)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & STOCK BOX (~M12)
C/C TRAY oswa CARRIER (M4 ~ M10)
C/C TRAY oswa CARRIER (M4 ~ M10)
BAT VÈTIKAL (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAPHITE-BOAT(M12)
Wafer Carrier System pou Pwosesis PECVD
▶ GRAPHITE BOAT (CT-Designed) Pwosesis M10/M12
• KONSEPS ESPESYAL DESIGN
▶ GRAPHITE BOAT (CT-Designed) Pwosesis M4/M6
▶ Pati akseswa BAT
▶ VÈTICAL BOAT-161.7mm WAFER
▶ VÈTICAL BOAT-166mm WAFER
▶ VÈTICAL BOAT-161.7mm, WAFER 166mm
Solè Selil Carrier & Metal TRC Carrier
TIP: Otomatik
GWO GOFFET : ① 156×156MM ② 156.75×156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180 × 180mm ⑥ 210 × 210mm
Itilizasyon: pote (Kasèt)
KAPASITE: 100 fèy
Anplasman: 4.76MM/5.953mm/6.35mm
DIMANSYON: Apeprè 559 × 220 × 220MM
Apeprè 712 × 260 × 260MM
AVANTAJ: Atmosfè
MATERYÈL: FLANM, BÒ BÒ-Aliminyòm (anodize)
SIDE PLATE-POM (Antistatik)
Kouvri ba anba-EPDM/PU/VITON (ASE)
TRC-METAL CARRIER (LIY ITIlizatè)
TRC-METAL CARRIER (LIY ITIlizatè)
TRC-METAL CARRIER (LIY ITIlizatè)
PLAK DOUCH & IMPLANT, TRANSPORT
